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{
"source": [
"Die",
"neuerung",
"sieht",
"hierfür",
"gassensoren",
"vor",
", Bei denen",
"der metalloxid-",
"halbleiter auf dem",
"substrat (1)",
"in form einer amorphen",
"metalloxid-halbleiter-",
"dünnschicht",
"(2) vorliegt."
],
"target": [
"The",
"invention",
"provides",
"gas sensors",
"for this purpose",
",",
"in which",
"the metal-oxide",
"semiconductor is on the",
"substrate (1)",
"in the form of an amorphous",
"metal-oxide semiconductor",
"thin layer",
"(2)."
],
"align": [
"0-0",
"1-1",
"2-2",
"3-4",
"4-3",
"6-6",
"7-7",
"8-8",
"9-9",
"10-10",
"11-11",
"12-12",
"13-13"
],
"post_edit": "The invention provides gas sensors for this purpose , in which the metal-oxide semiconductor is on the substrate (1) in the form of an amorphous metal-oxide semiconductor thin layer (2).",
"duration": 1735996,
"source_value": "die neuerung sieht hierfür gassensoren vor , bei denen der metalloxid @-@ halbleiter auf dem substrat ( 1 ) in form einer amorphen metalloxid @-@ halbleiter @-@ dünnschicht ( 2 ) vorliegt ."
}
|
