{
  "source": [
    "Die",
    "neuerung",
    "sieht",
    "hierfür",
    "gassensoren",
    "vor",
    ", Bei denen",
    "der metalloxid-",
    "halbleiter auf dem",
    "substrat (1)",
    "in form einer amorphen",
    "metalloxid-halbleiter-",
    "dünnschicht",
    "(2) vorliegt."
  ],
  "target": [
    "The",
    "invention",
    "provides",
    "gas sensors",
    "for this purpose",
    ",",
    "in which",
    "the metal-oxide",
    "semiconductor is on the",
    "substrate (1)",
    "in the form of an amorphous",
    "metal-oxide semiconductor",
    "thin layer",
    "(2)."
  ],
  "align": [
    "0-0",
    "1-1",
    "2-2",
    "3-4",
    "4-3",
    "6-6",
    "7-7",
    "8-8",
    "9-9",
    "10-10",
    "11-11",
    "12-12",
    "13-13"
  ],
  "post_edit": "The invention provides gas sensors for this purpose , in which the metal-oxide semiconductor is on the substrate (1) in the form of an amorphous metal-oxide semiconductor thin layer (2).",
  "duration": 1735996,
  "source_value": "die neuerung sieht hierfür gassensoren vor , bei denen der metalloxid @-@ halbleiter auf dem substrat ( 1 ) in form einer amorphen metalloxid @-@ halbleiter @-@ dünnschicht ( 2 ) vorliegt ."
}