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+{
+ "source": [
+ "Die",
+ "neuerung",
+ "sieht",
+ "hierfür",
+ "gassensoren",
+ "vor",
+ ", Bei denen",
+ "der metalloxid-",
+ "halbleiter auf dem",
+ "substrat (1)",
+ "in form einer amorphen",
+ "metalloxid-halbleiter-",
+ "dünnschicht",
+ "(2) vorliegt."
+ ],
+ "target": [
+ "The",
+ "invention",
+ "provides",
+ "gas sensors",
+ "for this purpose",
+ ",",
+ "in which",
+ "the metal-oxide",
+ "semiconductor is on the",
+ "substrate (1)",
+ "in the form of an amorphous",
+ "metal-oxide semiconductor",
+ "thin layer",
+ "(2)."
+ ],
+ "align": [
+ "0-0",
+ "1-1",
+ "2-2",
+ "3-4",
+ "4-3",
+ "6-6",
+ "7-7",
+ "8-8",
+ "9-9",
+ "10-10",
+ "11-11",
+ "12-12",
+ "13-13"
+ ],
+ "post_edit": "The invention provides gas sensors for this purpose , in which the metal-oxide semiconductor is on the substrate (1) in the form of an amorphous metal-oxide semiconductor thin layer (2).",
+ "duration": 1735996,
+ "source_value": "die neuerung sieht hierfür gassensoren vor , bei denen der metalloxid @-@ halbleiter auf dem substrat ( 1 ) in form einer amorphen metalloxid @-@ halbleiter @-@ dünnschicht ( 2 ) vorliegt ."
+}